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Pumping speed for N2 (*)
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2050 l/s
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Pumping speed for He (*)
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1800 L/s
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Pumping speed for H2 (*)
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1500 L/s
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Compression ratio for N2
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>8 x 108
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Compression ratio for He
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8 x 105
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Compression ratio for H2
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4 x 104
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Base pressure* (with recommended forepump)
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10-10 mbar (7.5 x 10-11 Torr) (**)
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Inlet Flange
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ISO 250F, CFF 12” O.D.
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Foreline flange
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KF 40 NW
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Other
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Nominal rotational speed
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33300 rpm
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Start-up time without gas load and with the recommended forepump
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< 6 minutes
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Minimum recommended forepump
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TriScroll 600
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Operational position
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Any
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Operating ambient temperature
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+5 °C to +35 °C
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Bakeout temperature
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120°C (CFF), 80°C (ISO)
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Max rotor temperature
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120 °C
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Vibration level (displacement)
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< 0.01 μm at inlet flange
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Lubricant
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Permanent lubrication
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Cooling requirements
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Water
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Coolant water
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Recommended flow: 200 l/h
Temperature: +15 °C to +30 °C Pressure: 3 to 5 bar (45 to 75 psi) |
Noise level
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<60 dB(A) at 1 meter
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Storage temperature
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-20°Cto+70°C
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Environment protection
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IP54
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Weight kg (lbs)
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ISO 250: 54.2 (119.5) CF 12”: 55.3 (121.9)
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(*): WITHOuT INLET SCREEN
(*): According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a CFF flange and using the recommended pre-vacuum pump
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