AWM90000 流量传感器

技术指标

Catalog Listings	AWM92100V	AWM92200V
Flow Range (Full Scale)	+/- 200 sccm
Pressure Range		+/- 2.0 H2O (5 mBar)
Null Voltage Shift, Typ.
-25°C to 25°C [-13ºF to 77ºF]	+/- 2.0 mV (1)	+/- 2.0 mV (1)
25°C to 85°C [77ºF to 185ºF]	+/- 2.0 mV (1)	+/- 2.0 mV (1)
Output Voltage Shift, Typ.
-25°C to 25°C [-13ºF to 77ºF]	-3.0% FSO (2)	25% Reading
25°C to 85°C [77ºF to 185ºF]	+/-1% FSO (2)	-30% Reading
1. Assumes low TCR Bridge resistance used (pins 2 and 8)
2. Requires recommended RC value of 1K Ohm is used (pins 3 to 7) and typ. Heater control circuit. Maximum current RH.

Specifications	Min.	Typ. Max.
Excitation (1)	8.0 Vdc	10 ±0.01 Vdc 15.0Vdc
Power Consumption		50 mW
Calibration Gas	Air
Ratiometricity Error (1)	± 0.30 typ. % Reading
Repeatability and Hysteresis (2)	± 0.35% Reading
Response Time	1 ms typ.
Pressure Drop @ Full Scale (200 sccm)	0.49 typ. mBar
Overpressure	25 psi max.
Operating Temperature Range	-25°C to 85°C[-13°F to 185°F]
Storage Temperature Range	-40°C to 90°C[-40°F to 194°F]
Vibration	20g’s, 10Hz to 2000Hz
Shock	100 g, 6 ms
Weight	5.6 grams
1. Output voltage is ratiometric to supply voltage.
2. Repeatability and Hysteresis tolerances reflect inherent inaccuracies of the measurement equipment.