型号
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V-1000
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V-1000X(双工作台)
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V-1000XS
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等离子工作模式
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RIE and DP
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主件
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电极结构
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平行平板式
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平台尺寸
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280mmW×280mmD
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300mmW×300mmD(Double stage)
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400mmW×375mmD
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工作室尺寸
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400mmW×400mmD×380mmH
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400mmW×400mmD×380mmH
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600mmW×554mmD×440mmH
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真空测量
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电容压力计
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反应气体系统
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双系统
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控制器
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Programmable controller
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显示屏
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Programmable terminal (touch panel)
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射频能量供应
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输入
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AC 200/220/380V,Three phase,
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高频输出功率
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1,000W
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1,000 & 1,500W
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发振器
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水晶发振
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发振频率
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13.56 MHz
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匹配调节
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自动调整
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真空泵 (Vacuum Pump)
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Displacement (置换量)
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670 & 1,000 liters/min.
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670 & 1,500 liters/min.
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1,000 & 1,500 liters/min.
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Inlet configuration(进口配置)
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NW40 with a flexible stainless steel hose (1 meter long)
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Outlet configuration(出口配置)
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NW40
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气体系统(Gas Systems)
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Purge gas(净化气体)
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Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer
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Driving gas(推进气体)
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Air or nitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) with a manometer
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Reaction gas G1(反应气体1)
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Oxygen (O2) and a mass flow controller (1000 secm)
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Reaction gas G2(反应气体2)
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Argon (Ar) and a mass flow controller (100 secm)
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Safety Mechanisms(安全机构)
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System Protections(系统保护)
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*Oscillator protection circuit *Front-door interlock switch (interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuum leak test function
*Air-purge end buzzer *Alarm buzzer *Emergency stop push-button switch
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Actions against a trouble of the vacuum pump(真空泵故障反应)
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The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes
*The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble of the vacuum pump
*The treatment process timer stops
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REQUIRED UTILITIES(必要的配套设施)
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Power Supply(电源供应)
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Main unit with vacuum pump
(配真空泵主机)
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Three phases, AC220V, 30 A, 60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)
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Gases(气体)
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Driving gas (推进气体)
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Air or nitrogen (N2) (Feed pressure: 5~7 kgf/cm2)
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Purge gas(净化气体)
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Nitrogen (N2) (Feed pressure: 2~7 kgf/cm2)
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Reaction gas G1(反应气体1)
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Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
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Reaction gas G2(反应气体2)
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Argon (Ar) (Feed pressure: 1.5 kgf/cm2)
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Connection port(连接端口)
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1/4" swagelok joint bulkhead union (SS-400-61)
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Note: Pressure regulators, filters and other protective devices shall be prepared by others.
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Connection Diameter of the Discharge Duct (and inlet Port)( 流注输送管口径)
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Vacuum pump's inlet port
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NW4O (with a flexible stainless steel hose of 1 meter long)
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Vacuum pump's outlet port
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NW4O
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Main unit's ozone outlet port
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163mm diameter
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Oscillator's ventilation port
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163mm diameter
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Note: Every port has a connector designed for a flexible hose. Connect a duct to these inlet and outlet ports.
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