日本爱发科ULVAC

日本爱发科ULVAC 低温泵 Speed TS型：

真空ポンプ（クライオポンプ）アルバック・クライオ株式会社

スーパートラップ　Speedシリーズ　TS型

ヘリウム冷凍機を用いるスーパートラップは、水分の排気速度を大幅にアップさせて、装置の稼働率向上に寄与します。

使用する冷媒は、地球温暖化係数が低く、環境に優しい製品です。

特　　長

●冷媒はヘリウムガスを使用します。フロンガスは不要です。

●短時間で冷却、昇温が完了。（5〜15分以内、仕様によって異なります）

●軽量、コンパクト、施工が簡単。（床置きユニットの設置スペースはフロン系トラップの3分の1程度）

用　　　途

●水分の多いバッチ式装置、光学用成膜装置等に最適。

●あらゆる真空装置に適用可能。

Vacuum Pump (Cryopump) ULVAC CRYOGENICS INCORPORATED

Cryopump CRYO-U Series (Option)

MBS-C CRYO-METER

· The MBS-C CRYO-METER can measure temperature from the cryogenic temperature of 10 K (–263 °C) to 350K (77 °C), and displays 3 temperature ranges. A cryogenic thermocouple for measurement of the 15 K cryopanel is immune to electric noise because of the sheath structure. The MBS-C CRYO-METER has two output signals for regeneration, and has a sheath type CA thermocouple for measurement of the 80 K shield.

MBD CRYO-METER

· In combination with the MBS-C CRYO-METER, the accurate temperature can be observed at remote position.

· MBD CRYO-METER can be used as a power source unit of the MBS-C CRYO-METER.

RBH Band heater

· The RBH can minimize warm up time, promote water evaporation and shorten rough time. By using the RBH band heater, regeneration can be performed effectively and completely. Installation in the cryo pump is easily done, even in a narrow space.

DT-1 Diode temperature sensor

The DS-1 measures accurately the wide temperature range (10 K-320 K). Within this temperature range, high and low temperature set points, adjustable from 10 K to 320 K, are available for automatic operation.

· DT-1 consists of DS-1 diode sensor and DI-1 diode indicator