BRONKHORST质量流量控制器

产品特点：
量程最小0-1mL/min；最大0-1250L/min
最大压力可达400BAR
精确的3F校准
无可移动部件
快速响应时间
模块化设计
低压降
全金属表面抛光处理

ACCURACY (ATCALIBRATIONUNDEROPERATINGCONDITIONS)	Standard 3F-Calibration: ±0.8% of reading plus ±0.2% of full scale Polynomial calibration: ±0.5% of reading plus ±0.1% of full scale
REPRODUCIBILITY	< 0.1% full scale
REPEATABILITY	< 0.2% of reading
RESPONSETIME	1...2 sec. (faster on request)
CONTROL STABILITY	< ±0.1% full scale (typical for 1 ln/min N2)
PRESSURE SENSITIVITY	0.1%/bar typ. N2 0.01%/bar typ. H2
ATTITUDE SENSITIVITY	max. error 0.015% at 1 bar N2and 90°change
VIBRATION SENSITIVITY	negligible
TEMPERATURE SENSITIVITY	zero point approx. 0.05% of full scale/°C
SUPPLY VOLTAGE SENSITIVITY	zero at correct supply voltages (acc. to electr. data)
CONTROLVALVE	closes automatically at setpoint < 1%
LEAKINTEGRITY	tested < 2 x 10-9mbar l/s He
RF	CE approved design
MECHANICALPARTS
PROCESSCONNECTIONS	see model number code; other on application
MATERIAL SOFCONSTRUCTION	stainless steel AISI 316L or comparable
SEALS	Viton, EPDM, elast. PTFE, other on application
SURFACE QUALITY	Ra 0.2...0.6 µm
OPERATING LIMITS
RANGE	2%...100%
TYPESOFGASES	all gases compatible with AISI 316L
TEMPERATURE	-10 °C up to +70 °C
WARMING-UPTIME	30 min. for optimum accuracy, 2 min. for accuracy ±2% of full scale
ELECTRICAL PROPERTIES
SUPPLY VOLTAGE	mass flow meter +15 V...24 V, 50 mA mass flow controller +15 V, 250 mA -15 V, 30 mA mass flow controller +24 V, 190 mA
OUTPUT SIGNAL	0...5 V, 0...10 V, 4…20mA
SETPOINT SIGNAL	0...5 V, 0...10 V, 4…20mA
ELECTRICAL CONNECTION	9-pin sub-D connector, cable length independent