原子吸收原位流量监测控制系统 IS6K

技术参数
SVT Associates has developed the unique AccuFlux Process Controller for real-time measurement and monitoring of atomic fluxes in a thin film deposition process. Based on Atomic Absorption Spectroscopy the system measures the atomic vapor flux density originating from solid and gas sources. A proprietary optical design and absolute material selectivity ensure multi-flux measurements with high accuracy for excellent composition control better than 0.3%.

仪器介绍
应用于：
MBE Growth (III/V, II/VI,)
Sputter Deposition (High Tc Superconductors, Dielectrics, Optical Coatings)
Nitriding and Nitrogen Doping
Oxidation and Oxygen Doping