Specifications:

炉体结构

Double layer steel case with mullite liner without water cooling or air cooling

加热元件

8 根碘钨灯管 (D=10 L=300 T =200, mm)

加热区

加热区12" 、恒温区 4"、恒温精度±5℃

炉管 &样品支架

• 炉管尺寸: 110 外径 x 103内径 x 381 长
• 样品支架及滑轨法兰, which is made 支架托盘采用氮化铝制成.
• • 控温精度± 5℃
    
     
  • 氮化铝支架托盘*大可放置 3"样品
  • 氮化铝具有非常好的导热性，它能及时显示在样品平台中样品的*佳真实的温度误差

密封系统

• 密封系统由不锈钢法兰、精密针阀及硅胶O型圈构成.
• 滑轨式法兰，放取样品更加方便

水冷机构

• 使用过程中必须通水冷却.
• 请确认冷却水流量≥3L/min，水温<20℃，水压> 25 PSI
• 建议采用水冷循环装置 以节约用水 (请点击查看).
• 警告：此RTP炉的*大持有时间不得少于600秒，1000℃〜1100℃，否则O形圈可能会融化

Flow-meter

One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min

Vacuum gauge

Digital vacuum gauge with a measurement range from 1 mtorr~800 torr is installed with the furnace.

Vacuum pressure & Gas Fitting 

• Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter.
• Pressure can reach 10^-4 torr by molecular pump with KF25 adapter.

           

• In order to increase the throughput and achieve high vacuum, you may replace the standard barbed hose fitting with the KF25 adapter, please click underline to order.
• For supplying high pressure gas, you may replace the standard barbed hose fitting with the VCR Face Seal Fitting, please click underline to order.

Temperature control

PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.

Thermal Couple

S type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath 

Programmable Temperature controller

• Built in protection from overheated and broken thermal couple
• 30 programmablesegments
• Auto tune function
• Temperature control accuracy: +/- 1ºC
• Built in RS485 port for PC control
• Software is included. (Computer is not included)
• One 15" screen laptop with operation software installed is available as option at $900 extra cost.         
• Click here to download the driver and software

Max. Heating Rate

Max. Cooling Rate

Working Temperature

Power Input

Dimension

Net weight