空间光调制器SLM

空间光调制器SLM的特点：此款空间光调制器SLM（Spatial light modulator）可应用于任何需要对光束进行连续调制的场合。其应用之一是用于高端光刻掩膜板。
Data of one-megapixel SLM （1M像素空间光调制器SLM指标如下）：
Parameter                        Value                                  Remark
Matrix size                       2048 × 512 mirrors
Pixel size                          16 × 16 μm²
Frame rate                       2 kHz
Mirror edge deflection        0 - 180 nm                          up to 350 nm possible
Wavelength                      248 nm                              up to ca. 1500 nm possible
Average beam power         40 mW                               elevated power possible; wavelength dependent
Data voltage                     0 - 25.5 V                           analogue
Data inputs                       256

此款空间光调制器SLM采用微光机电系统构成，详细的说明请参考如下：
The devices are so called MOEMS (Micro Opto Electro Mechanical System). Micromirrors are fabricated with a pitch of >10 μm using thin film technology on top of a planarized CMOS backplane. The circuit provides electrodes underneath the mirrors to supply each mirror with individual voltages. The voltage difference between the electrode and the mirror generates an electrostatic force that deflects the mirror towards the electrode. The mirror material is a highly reflective
aluminium alloy. Mirrors made from alternative materials and coatings for high reflectivity for very demanding applications
are available or under development.