法国Annealsys MC100

法国Annealsys MC100 MOCVD设备，R&D应用4英寸MOCVD设备
应用：在硅基片，玻璃，太阳能电池多晶硅，化合物半导体基片上长金属和合金，过渡金属元素氮化物，碳纳米管，纳米线等膜层

应用

• Semiconductor: SiO2, HfO2, Ta2O5, Cu, TiN, TaN, …

•半导体： : SiO2, HfO2, Ta2O5, Cu, TiN, TaN, …

• High k Dielectric: SrTiO3, BaTiO3, Ba(1-x)SrxTiO3 (BST)

•高K绝缘体: SrTiO3, BaTiO3, Ba(1-x)SrxTiO3 (BST)

• Ferroelectric: SBT, SBTN, PLZT, PZT,…

•铁电物质: SBT, SBTN, PLZT, PZT,…

• Superconductor: YBCO, Bi-2223, Bi-2212, Tl-1223, …

•超导体： : YBCO, Bi-2223, Bi-2212, Tl-1223, …

• Piezoelectric: (Pb, Sr)(Zr,Ti)O3, Modified Lead Titanate

•压电的: (Pb, Sr)(Zr,Ti)O3,改良钛酸铅

• Metals: Pt, Cu, …

•金属： : Pt, Cu, …

• Carbon nanotubes, nanowires

•碳纳米管，纳米线

• Colossal Magneto Resistance

•大型磁致电阻

• Thermal coatings

•热涂层

• Buffer layers

•缓冲膜层

• Mechanical coatings

•机械涂层

• Optics

•光学

• Etc…

•等等

基片类型

• Semiconductor: SiO2, HfO2, Ta2O5, Cu, TiN, TaN, …

•半导体： : SiO2, HfO2, Ta2O5, Cu, TiN, TaN, …

• High k Dielectric: SrTiO3, BaTiO3, Ba(1-x)SrxTiO3 (BST)

•高K绝缘体: SrTiO3, BaTiO3, Ba(1-x)SrxTiO3 (BST)

• Ferroelectric: SBT, SBTN, PLZT, PZT,…

•铁电物质: SBT, SBTN, PLZT, PZT,…

• Superconductor: YBCO, Bi-2223, Bi-2212, Tl-1223, …

•超导体： : YBCO, Bi-2223, Bi-2212, Tl-1223, …

• Piezoelectric: (Pb, Sr)(Zr,Ti)O3, Modified Lead Titanate

•压电的: (Pb, Sr)(Zr,Ti)O3,改良钛酸铅

• Metals: Pt, Cu, …

•金属： : Pt, Cu, …

• Carbon nanotubes, nanowires

•碳纳米管，纳米线

• Colossal Magneto Resistance

•大型磁致电阻

• Thermal coatings

•热涂层

• Buffer layers

•缓冲膜层

• Mechanical coatings

•机械涂层

• Optics

•光学

• Etc…

•等等

设备特性

• Stainless steel thermally controlled chamber technology*

•不锈钢热控制腔室技术*

• Rotating and heating substrate holder up to 850°C

•旋转加热基片托，最高至850°C

• Substrate holder with vertical motion

•基片托垂直运动

• Up to 4 precursors or precursor mixtures

•最多4个源或源混合

• Vaporizer reactor by-pass

•蒸发器反应器支路

• Thermocouple control with PID temperature controller

•热电偶的控制器通过温度控制器的PID实现

• Vacuum and pressure control

•真空和压力控制

• Purge gas line with needle valve

•配有针阀的吹扫气路

• Up to 6 process gas lines with digital MFC

•配有数字MFC，最多6条工艺气路

• PC control with Ethernet communication

•以太网PC控制

设备的最优设计

• Compatible with a wide range of liquid vaporizers

•适用宽范围的液体蒸发器

• Up to 4 precursor liquid lines

•最多4个源液体管路

• Optimized organometallic chemical liquid line panel

•最优的有机金属化学液体管路面板

• Manual or automatic procedure for chemical cleaning of liquid lines

•手动或自动程序化学清洁液体管路

• Up to 2 chemical reacting compounds connections on chamber (H2O, O3…)

•最多2个化学反应复合物与腔室连接(H2O, O3…)

• Heated by-pass valve up to 300℃

•支路阀加热，最高至300℃

• Vertical linear motion mechanism up to 100mm

•垂直线性运动机能，最高至100mm

• Gas panel for CVD applications

•CVD应用气体面板